In-situ multi-dimensional observation of masklessly implanted sites using MeV heavy ion microprobes
- 1 May 1993
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 77 (1) , 373-377
- https://doi.org/10.1016/0168-583x(93)95569-q
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Focused High-Energy Heavy Ion BeamsJapanese Journal of Applied Physics, 1990
- muprobe using focused 1.5 MeV helium ion and proton beamsNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1988
- Multidimensional ion microbeam analysisNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1986