Focused High-Energy Heavy Ion Beams
- 1 June 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (6R)
- https://doi.org/10.1143/jjap.29.1230
Abstract
A focused ion beam line of MeV heavy ions has been developed by combining a focusing system consisting of objective slits and a magnetic quadrupole doublet to the beam line of a tandem-type accelerator. The demagnification factors of this system were determined to be 1/3.4 for the horizontal direction and 1/14 for the vertical direction, and a minimum beam spot size of 5.6 µm×8.0 µm was achieved. This system allows us ion beam processes such as maskless MeV ion implantation and ion beam microanalysis using heavy ions.Keywords
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