A shutter-controlled microbeam combined with scanning system for two-dimensional backscattering images
- 1 March 1978
- journal article
- Published by Elsevier in Nuclear Instruments and Methods
- Vol. 149 (1-3) , 663-664
- https://doi.org/10.1016/0029-554x(78)90947-3
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- The use of focused ion beams for analysisThin Solid Films, 1973
- The investigation of lateral damage effects of ion-implanted layers by back-scattering techniquesThin Solid Films, 1973
- Theoretical Study of Slit ScatteringReview of Scientific Instruments, 1962