General Equations of Symmetrical Ellipsometer Arrangements

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Abstract
Simplified equations for two commonly used ellipsometer arrangements are derived, where the compensator is placed either before or after the specimen and, at fixed compensator azimuth, polarizer and analyzer azimuths are adjusted for null. The symmetry in the equations, which arises from the similar function which characterizes either the compensator or the specimen, is clearly evident. In addition to the considerable simplification of certain working equations, the analysis shows that the measurement of the specimen attenuation ratio is independent of either compensator properties or azimuth. Also, and of considerable practical interest, unambiguous determination can be made of the angular range of the specimen retardation, whether 0≤Δ≤π or π≤Δ≤2π.

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