Vinyl ethers in ultraviolet curable formulations for step and flash imprint lithography
- 1 January 2004
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
- Vol. 22 (1) , 131-135
- https://doi.org/10.1116/1.1635849
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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