Der Einfluß der Rauhigkeit der Probenoberfläche auf die Ergebnisse ellipsometrischer Messungen bei GaAs
- 1 January 1976
- journal article
- research article
- Published by Wiley in Crystal Research and Technology
- Vol. 11 (6) , 645-652
- https://doi.org/10.1002/crat.19760110609
Abstract
Die Ergebnisse ellipsometrischer Messungen an GaAs zeigen einige Diskrepanzen. Diese Tatsache wird auf Oberflächenrauhigkeiten zurückgeführt und an Hand eines einfachen Modells diskutiert. Es wird gezeigt, in welcher Art und Weise eine rauhe Oberfläche die ellipsometrisch gemessene Filmdicke und den Brechungsindex beeinflußt.Keywords
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