Surface texturing of silicon by dynamic recoil mixing
- 1 July 1984
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 117 (3) , 223-232
- https://doi.org/10.1016/0040-6090(84)90290-6
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Ion beam techniques for material modificationVacuum, 1982
- Ion interaction with solids: Surface texturing, some bulk effects, and their possible applicationsJournal of Vacuum Science and Technology, 1981
- The life cycle of copper conesRadiation Effects, 1979
- Materials for low-cost solar cellsReports on Progress in Physics, 1978
- A two-gun ion beam system for dynamic recoil implantationVacuum, 1978
- Recoil implantation of materialsJournal of Materials Science, 1977
- Surface texturing by sputter etchingJournal of Vacuum Science and Technology, 1976
- Interaction of Al layers with polycrystalline SiJournal of Applied Physics, 1975
- Thin Films and Solid-Phase ReactionsScience, 1975
- Metal contact induced crystallization in films of amorphous silicon and germaniumJournal of Non-Crystalline Solids, 1972