Investigation of plasma surface cleaning in planar low-pressure microwave discharges
- 1 September 1995
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 74-75, 59-62
- https://doi.org/10.1016/0257-8972(95)08221-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Optical Emission Diagnostic of a Low Pressure Planar Microwave Discharge for Plasmachemical DepositionContributions to Plasma Physics, 1991