Measurement of intrinsic stress in silver films by using ellipsometry
- 15 March 1986
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 59 (6) , 1787-1789
- https://doi.org/10.1063/1.336453
Abstract
Annealing of silver films in the temperature range 30–300 °C is found to result in the minimization of stress in the films which, in turn, affects the hillock growth on the film surface. This variation in hillock growth is studied by using ellipsometry. It is found that the numerical value of the thermal stress in the film is approximately equal to that of the intrinsic stress when the hillock growth is retarded. The intrinsic stress in silver films is calculated by using this technique for different film thicknesses. The values of the film thicknesses are so selected that the difference between them is quite large. The results obtained in the present work are found to be in fairly good agreement with those obtained by earlier workers.This publication has 9 references indexed in Scilit:
- Effect of annealing on the reflectivity of silver filmsThin Solid Films, 1981
- Hillock formation in lead films by grain boundary slidingPhilosophical Magazine A, 1980
- Hillock formation, hole growth and agglomeration in thin silver filmsThin Solid Films, 1980
- Surface tools for automated non-destructive inspection of contaminationSurface Technology, 1979
- The development of stress and surface temperature during deposition of lithium fluoride filmsPhilosophical Magazine, 1963
- Epitaxially induced strains in Cu2O films on copper single crystals—I X-ray diffraction effectsActa Metallurgica, 1962
- The Optical Constants of Silver, Gold, Copper, and Aluminum I The Absorption Coefficient kJournal of the Optical Society of America, 1954
- Optical Constants of Silver, Gold, Copper, and Aluminum II The Index of Refraction nJournal of the Optical Society of America, 1954
- Electron Diffraction Evidence for the Existence of Microstress in Evaporated Metal FilmsJournal of Applied Physics, 1952