Deposition of large area YBa2Cu3O7 − δ thin films by magnetron sputtering
- 15 October 1990
- journal article
- Published by Elsevier in Journal of the Less Common Metals
- Vol. 164-165, 352-358
- https://doi.org/10.1016/0022-5088(90)90233-a
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Effect of deposition rate on properties of YBa2Cu3O7−δ superconducting thin filmsApplied Physics Letters, 1990
- Preparation and superconducting properties of ultrathin YBa2Cu3O7−x filmsApplied Physics Letters, 1989
- Stability limits of the perovskite structure in the Y-Ba-Cu-O systemApplied Physics Letters, 1989
- Phase diagram and oxygen stoichiometry of Y-Ba-Cu-O thin filmsApplied Physics Letters, 1988
- Direct production of crystalline superconducting thin films of YBa2Cu3O7 by high-pressure oxygen sputteringSolid State Communications, 1988