Structural and electronic properties of low dielectric constant fluorinated amorphous carbon films

Fluorinated amorphous carbon $\mathrm{(a-}{\mathrm{CF}}_x)$ films were studied by high-resolution x-ray absorption, emission, and photoelectron spectroscopy. The composition and local bonding information were obtained and correlated with substrate temperature during deposition. The data suggest that the structure of the $\mathrm{a-}{\mathrm{CF}}_x$ is mostly of carbon rings connected by ${\mathrm{CF}}_{\mathrm{2}}$ groups. The cross linking increases with substrate temperature.