Magnetically actuated, addressable microstructures
- 1 September 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (3) , 249-256
- https://doi.org/10.1109/84.623114
Abstract
Surface-micromachined, batch-fabricated structures that combine plated-nickel films with polysilicon mechanical flexures to produce individually addressable, magnetically activated devices have been fabricated and tested. Individual microactuator control has been achieved in two ways: (1) by actuating devices using the magnetic field generated by coils integrated around each device and (2) by using electrostatic forces to clamp selected devices to an insulated ground plane while unclamped devices are freely moved through large out-of-plane excursions by an off-chip magnetic field. The present application for these structures is as micromirrors for microphotonic systems where they can be used either for selection from an array of mirrors or else individually for switching among fiber paths.Keywords
This publication has 9 references indexed in Scilit:
- Magnetic Microactuation Of Torsional Polysilicon StructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly SystemsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- A first functional current excited planar rotational magnetic micromotorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coilsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Magnetic microactuation of torsional polysilicon structuresSensors and Actuators A: Physical, 1996
- Magnetic microactuation of polysilicon flexure structuresJournal of Microelectromechanical Systems, 1995
- A silicon microvalve with combined electromagnetic/electrostatic actuationSensors and Actuators A: Physical, 1993
- Microactuators with moving magnets for linear, torsional or multiaxial motionSensors and Actuators A: Physical, 1992
- Demagnetizing Factors of the General EllipsoidPhysical Review B, 1945