Die lonenimplantation als Dotiertechnologie

This publication has 65 references indexed in Scilit:

• Range and stopping-power tables for heavy ions
  Atomic Data and Nuclear Data Tables, 1970
• Preface
  The Military Balance, 1970
• Implantation profiles of ³²P channeled into silicon crystals
  Canadian Journal of Physics, 1968
• Ion implantation in semiconductors—Part I: Range distribution theory and experiments
  Proceedings of the IEEE, 1968
• Penetration of Heavy Ions of keV Energies into Monocrystalline Tungsten
  Physical Review B, 1964
• Energy Dissipation by Ions in the kev Region
  Physical Review B, 1961
• Thomas-Fermi fields for molecules with tetrahedral and octahedral symmetry
  Mathematical Proceedings of the Cambridge Philosophical Society, 1952
• Equations of State of Elements Based on the Generalized Fermi-Thomas Theory
  Physical Review B, 1949
• Nuclear Physics C. Nuclear Dynamics, Experimental
  Reviews of Modern Physics, 1937
• Bremsverm gen von Atomen mit mehreren Elektronen
  The European Physical Journal A, 1933