Nanoscale fabrication using single-ion impacts
- 13 September 2002
- journal article
- Published by IOP Publishing in Smart Materials and Structures
- Vol. 11 (5) , 686-690
- https://doi.org/10.1088/0964-1726/11/5/310
Abstract
Wedescribe a novel technique for the fabrication of nanoscale structures, based on the development of localized chemical modification caused in a PMMA resist by the implantation of single ions. The implantation of 4 MeV He ions through a thin layer of PMMA into an underlying silicon substrate causes latent damage,in the resist. On development of the resist we demonstrate the formation within the PMMA layer of clearly defined etched holes, of typical diameter 30 nm, observed using an atomic force microscope employing a carbon nanotube SPM probe in intermittent-contact mode. This technique has significant potential applications. Used purely to register the passage of an ion, it may be a usefulKeywords
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