High-temperature modeling and characterization of 6H silicon carbide metal-oxide-semiconductor field-effect transistors

Abstract
We expand upon previous work [S. K. Powell, N. Goldsman, J. M. McGarrity, J. Bernstein, C. J. Scozzie, and A. Lelis, J. Appl. Phys. 92, 4053 (2002)] by applying the device model to 6H silicon carbide metal-oxide-semiconductor field-effect transistors operating at high temperatures. We compare the model predictions with the device measurements from room temperature to 200 °C and find agreement.