Surface structural damage produced in InP(100) by R.F. plasma or sputter deposition
- 1 July 1983
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 105 (2) , 187-196
- https://doi.org/10.1016/0040-6090(83)90209-2
Abstract
No abstract availableThis publication has 17 references indexed in Scilit:
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