Geometrical and voltage resolution of electrical sampling scanning force microscopy
- 17 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1005-1008
- https://doi.org/10.1109/mwsym.1994.335186
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Voltage contrast in integrated circuits with 100 nm spatial resolution by scanning force microscopyJournal of Physics D: Applied Physics, 1993
- Picosecond electrical sampling using a scanning force microscopeElectronics Letters, 1992
- High-frequency circuit characterization using the AFM as a reactive near-field probeUltramicroscopy, 1992
- High-resolution capacitance measurement and potentiometry by force microscopyApplied Physics Letters, 1988