Lineshape extraction from MeV He+ backscattering energy spectra: Aluminum oxide on silicon
- 3 May 1971
- journal article
- Published by Elsevier in Physics Letters A
- Vol. 35 (1) , 21-22
- https://doi.org/10.1016/0375-9601(71)90013-2
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- Evaluation of Silicon Nitride Layers of Various Composition by Backscattering and Channeling-Effect MeasurementsJournal of Applied Physics, 1971
- Analysis of amorphous layers on silicon by backscattering and channeling effect measurementsSurface Science, 1970