Development of an electrostatic actuator exceeding 10 N propulsive force
- 1 January 1992
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
The actuator developed consists of a stack of ten thin actuators previously developed by the authors. The stacked actuator is 120 mm*110 mm*5 mm in overall size and 70 g in weight. It is equipped with a position sensor with an 80- mu m resolution and embedded in a closed-loop control, improving speed and power performance by a factor of about two, reaching top values of 16 cm/s and 1.2 W of mechanical power. The maximum values of force/weight and power/weight ratio of the stacked actuator are 290 N/kg and 17 W/kg, respectively. A propulsive force of 21 N has been achieved with a +or-1000-V excitation voltage.Keywords
This publication has 7 references indexed in Scilit:
- The wobble motor: an electrostatic, planetary-armature, microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- IC-processed micro-motors: design, technology, and testingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Shape memory alloy servo actuator system with electric resistance feedback and application for active endoscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Multi-layered electrostatic film actuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- Rotary Ultrasonic Motor using Extensional Vibration of a RingJapanese Journal of Applied Physics, 1986
- GelsScientific American, 1981