Multi-layered electrostatic film actuator
- 4 December 2002
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 30, 166-171
- https://doi.org/10.1109/memsys.1990.110270
Abstract
A multilayered electrostatic film actuator to realize a high force/weight ratio actuator applicable for large-scale machines is proposed. It has numerous films with plenty of small electrodes stacked and connected. In order to build this structure, an electrostatic actuator named the image charge stepping actuator has been developed. It utilizes image charges induced on a high resistance to produce force. It is fabricated on polymer films and a prototype of the multilayered actuator with four film actuators has been constructed. The fabricated multilayered actuator can produce a force of 0.4 N.Keywords
This publication has 8 references indexed in Scilit:
- The wobble motor: an electrostatic, planetary-armature, microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Electroquasistatic induction micromotorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- IC-processed micro-motors: design, technology, and testingPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Shape memory alloy servo actuator system with electric resistance feedback and application for active endoscopePublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- The fabrication of an electrostatic linear actuator by silicon micromachiningIEEE Transactions on Electron Devices, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- GelsScientific American, 1981
- A surface-charge induction motorProceedings of the IEEE, 1971