Single-disk and double-disk viscous micropumps
- 1 July 2005
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 122 (1) , 149-158
- https://doi.org/10.1016/j.sna.2005.03.072
Abstract
No abstract availableKeywords
This publication has 13 references indexed in Scilit:
- Design and Analysis of a Surface Micromachined Spiral-Channel Viscous PumpJournal of Fluids Engineering, 2003
- A thermal-bubble-actuated micronozzle-diffuser pumpJournal of Microelectromechanical Systems, 2002
- Miniature valveless pumps based on printed circuit board techniqueSensors and Actuators A: Physical, 2001
- Fabrication and experiment of a planar micro ion drag pumpSensors and Actuators A: Physical, 1998
- Thin-film shape-memory alloy actuated micropumpsJournal of Microelectromechanical Systems, 1998
- Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropumpJournal of Micromechanics and Microengineering, 1996
- A valve-less planar fluid pump with two pump chambersSensors and Actuators A: Physical, 1995
- Integrated flow-regulated silicon micropumpSensors and Actuators A: Physical, 1994
- A micromachined electrohydrodynamic (EHD) pumpSensors and Actuators A: Physical, 1991
- Microfabricated electrohydrodynamic pumpsSensors and Actuators A: Physical, 1990