Fabrication and experiment of a planar micro ion drag pump
- 1 October 1998
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 70 (1-2) , 1-5
- https://doi.org/10.1016/s0924-4247(98)00105-8
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
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