The structure of silicon nitride films. II. Non-stoichiometric silicon nitride
- 16 January 1979
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 51 (1) , 49-56
- https://doi.org/10.1002/pssa.2210510104
Abstract
No abstract availableKeywords
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