Thermal and ion-induced, metastable-cubic Al3M phases in Al-Ti and Al-Hf thin films
- 1 November 1988
- journal article
- conference paper
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 64 (9) , 4478-4483
- https://doi.org/10.1063/1.341272
Abstract
Thermal and ion‐induced reactions in codeposited, multilayer and bilayer Al‐Ti and Al‐Hf structures were studied by transmission electron microscopy and Rutherford backscattering. A metastable Al3 M (M being Ti or Hf) phase was found by both ion beam mixing and thermal annealing. The metastable phases have a cubic structure with lattice parameters a=3.98±0.01 Å and 4.08±0.01 Å for Al‐Ti and Al‐Hf, respectively, at a composition of Al3M. The metastable phase transforms to the tetragonal equilibrium compound at annealing temperatures approximately 400 °C. The effectiveness of ion beam mixing is demonstrated by its lower formation temperatures and faster reaction rates. The thermally induced metastable phase formation is ascribed to a lower nucleation barrier than that of the equilibrium phase.This publication has 15 references indexed in Scilit:
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