Photoinduced transformation of polysiloxane layers to SiO2
- 1 December 1989
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 43 (1-4) , 301-303
- https://doi.org/10.1016/0169-4332(89)90229-8
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Deposition of high quality SiO2 layers from TEOS by excimer laserApplied Surface Science, 1989