Thin-Film Bulk Acoustic Resonators Employing ZnO/Pyrex-Glass Composite Diaphragm Structure
- 1 May 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (5S)
- https://doi.org/10.1143/jjap.33.2998
Abstract
This paper discusses the application of ZnO/Pyrex-glass composite diaphragm structure to thin-film bulk acoustic resonators (FBARs). Analysis of ZnO/Pyrex-glass composite diaphragm structure showed for thickness-longitudinal vibration that zero temperature coefficient of frequency with relatively large electromechanical coupling constant of about 20% is realised for the second- and third-order resonances as well as for the fundamental resonance. An FBAR employing the ZnO/Pyrex-glass composite diaphragm structure was fabricated, and Q values of 970 and 858 were obtained, respectively, for the fundamental and second-order resonances at 298.7 MHz and 497.5 MHz.Keywords
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