The effect of temperature on properties of RF Sputtered BaTiO3films
- 1 October 1981
- journal article
- research article
- Published by Taylor & Francis in Ferroelectrics
- Vol. 37 (1) , 685-686
- https://doi.org/10.1080/00150198108223521
Abstract
RF sputtered BaTiO3 films were found t o change from amorphous to crystalline (tetragonal) depending only on the substrate surface temperature during the d e position. X-ray diffraction indicates that films formed below 700°C surface temperature are amorphous, while above 800°C crystalline films are formed. Dielectric constant, density, energy band-gap and refractive index of the films were measured in b oth the amorphous and crystalline states and were compared t o measurements made on bu lk ceramic and single crystal BaTiO3.Keywords
This publication has 3 references indexed in Scilit:
- Characterization of amorphous barium titanate films prepared by rf sputteringJournal of Vacuum Science and Technology, 1979
- Accurate Determination of the Ordinary-Ray Refractive Index in BaTiO3Journal of Applied Physics, 1964
- Infra-red Absorption in SemiconductorsReports on Progress in Physics, 1956