Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry
- 1 October 1992
- journal article
- research article
- Published by Wiley in Journal of Polymer Science Part A: Polymer Chemistry
- Vol. 30 (11) , 2427-2441
- https://doi.org/10.1002/pola.1992.080301117