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  3. Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry
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  5. 10.1002/pola.1992.080301117
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  3. Substrate temperature effects on film chemistry in plasma deposition of organics. III. Analysis by static secondary ion mass spectrometry
  4. Cited-By
  5. 10.1002/pola.1992.080301117

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