Determination of mechanical properties of thin films: a theoretical feasibility study
- 8 October 1993
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 60 (1-3) , 396-400
- https://doi.org/10.1016/0257-8972(93)90120-d
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Metallurgical topics in silicon device interconnections: Thin film stressesInternational Materials Reviews, 1989
- An Approximate Analysis of Stresses in Multilayered Elastic Thin FilmsJournal of Applied Mechanics, 1988
- Stresses in Bi-Metal ThermostatsJournal of Applied Mechanics, 1986