Bulk micromachining characterization of 0.2 μm HEMT MMIC technology for GaAs MEMS design
- 27 February 1998
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 51 (1-3) , 267-273
- https://doi.org/10.1016/s0921-5107(97)00282-1
Abstract
No abstract availableKeywords
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