Selective wet etching of a heterostructure with citric acid-hydrogen peroxide solutions for pseudomorphic GaAs/AlxGa1−xAs/InyGa1−yAs heterojunction field effect transister fabrication
- 1 December 1995
- journal article
- Published by Elsevier in Materials Science and Engineering: B
- Vol. 35 (1-3) , 230-233
- https://doi.org/10.1016/0921-5107(95)01414-4
Abstract
No abstract availableKeywords
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