Oxygen ion beam assisted thin film deposition
- 1 June 1990
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 41 (3) , 259-267
- https://doi.org/10.1016/0257-8972(90)90137-2
Abstract
No abstract availableThis publication has 18 references indexed in Scilit:
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