Thin film annealing by ion bombardment
- 1 June 1980
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 69 (1) , 99-105
- https://doi.org/10.1016/0040-6090(80)90207-2
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- The effect of ion irradiation on the adherence of germanium filmsThin Solid Films, 1978
- Gas Incorporation into Sputtered FilmsJournal of Applied Physics, 1967
- Self-Diffusion in GermaniumPhysical Review B, 1956
- Production of Atomic Displacements by High-Energy ParticlesAmerican Journal of Physics, 1956
- On the Nature of Radiation Damage in MetalsJournal of Applied Physics, 1954
- Annealing of Bombardment Damage in Germanium: ExperimentalPhysical Review B, 1953