High Resolution Observation of Void Motion in Passivated Metal Lines Under Electromigration Stress
- 24 October 1992
- journal article
- Published by Springer Nature in MRS Proceedings
- Vol. 265 (1) , 33-38
- https://doi.org/10.1557/proc-265-33
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- In situ observations of dc and ac electromigration in passivated Al linesApplied Physics Letters, 1991
- Coating, Mechanical Constraints, and Pressure Effects on ElectromigrationApplied Physics Letters, 1972