Use of channeling in association with charged particle activation to study the position of light elements at trace level in crystals: The case of carbon in GaAlAs prepared by MO-VPE
- 1 April 1986
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 15 (1-6) , 328-332
- https://doi.org/10.1016/0168-583x(86)90313-7
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Direct evidence for the site of substitutional carbon impurity in GaAsApplied Physics Letters, 1982
- Electrostatic analysis of backscattered heavy ions for semiconductor surface investigationRevue de Physique Appliquée, 1981
- The problem of diffusion during charged particle activation analysis; the case of18F in pure germanium single crystalsJournal of Radioanalytical and Nuclear Chemistry, 1980
- The average stopping power method for accurate charged particle activation analysisNuclear Instruments and Methods, 1978