Aluminium implantation of p-SiC for ohmic contacts
- 31 August 1997
- journal article
- Published by Elsevier in Diamond and Related Materials
- Vol. 6 (10) , 1414-1419
- https://doi.org/10.1016/s0925-9635(97)00047-2
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- A critical review of ohmic and rectifying contacts for silicon carbideMaterials Science and Engineering: B, 1995