18. Initial etching in an rf butane plasma
- 1 January 1978
- Vol. 28 (10-11) , 449-451
- https://doi.org/10.1016/s0042-207x(78)80020-7
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Deposition of hard and insulating carbonaceous films on an r.f. target in a butane plasmaThin Solid Films, 1976
- Ion-beam-deposited polycrystalline diamondlike filmsApplied Physics Letters, 1976
- The deposition of hard surface layers by hydrocarbon cracking in a glow dischargeThin Solid Films, 1976
- X-ray photoemission studies of diamond, graphite, and glassy carbon valence bandsPhysical Review B, 1974
- Ion-Beam Deposition of Thin Films of Diamondlike CarbonJournal of Applied Physics, 1971