Coupled ac photocurrent and photothermal reflectance response theory of semiconducting p-n junctions. I
- 1 December 1989
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 66 (11) , 5572-5583
- https://doi.org/10.1063/1.343662
Abstract
A formalism involving the ac photocurrent and photothermal reflectance (PTR) spectroscopic response of a semiconducting p‐n junction device is presented. The differential equations for the photovoltaic and PTR signals are solved explicitly and special limits of use in experimental applications [J. Appl. Phys. 6 6, ⧠ ⧠ ⧠ ⧠ (1989), part II] are considered. The dependence of the photocurrent and PTR signal modulation frequency response on electronic transport parameters is identified and the suitability of ac PTR as a noncontact diagnostic technique is assessed in comparison with the more conventional ac photocurrent method.This publication has 10 references indexed in Scilit:
- Combined ac photocurrent and photothermal reflectance measurements in semiconducting p-n junctions. IIJournal of Applied Physics, 1989
- Photothermal wave imaging of metal-oxide-semiconductor field-effect transistor structuresJournal of Applied Physics, 1988
- Nondestructive Measurement of Minority Carrier Lifetimes in Si Wafers Using Frequency Dependence of ac PhotovoltagesJapanese Journal of Applied Physics, 1986
- Ion implant monitoring with thermal wave technologyApplied Physics Letters, 1985
- Thermal and plasma wave depth profiling in siliconApplied Physics Letters, 1985
- A Non-Destructive Method for Measuring Lifetimes for Minority Carriers in Semiconductor Wafers Using Frequency-Dependent ac PhotovoltagesJapanese Journal of Applied Physics, 1983
- Observation of p-n Junctions with a Flying-Spot Scanner Using a Chopped Photon BeamJapanese Journal of Applied Physics, 1982
- Optical heating in semiconductorsPhysical Review B, 1980
- Temperature dependence of the optical properties of siliconJournal of Applied Physics, 1979
- Photo-acoustic spectroscopy of solidsReview of Scientific Instruments, 1977