Studies of micro actuators in Japan
- 7 January 2003
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- p. 1559-1564
- https://doi.org/10.1109/robot.1989.100200
Abstract
No abstract availableThis publication has 8 references indexed in Scilit:
- Normally close microvalve and micropump fabricated on a silicon waferPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- The wobble motor: an electrostatic, planetary-armature, microactuatorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- An operational harmonic electrostatic motorPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- A proposal for a superconducting actuator using Meissner effectPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2003
- Integrated movable micromechanical structures for sensors and actuatorsIEEE Transactions on Electron Devices, 1988
- Integrated sensor and actuator systems.IEEJ Transactions on Industry Applications, 1988
- Design considerations for a practical electrostatic micro-motorSensors and Actuators, 1987
- Effects of Material and Processing Parameters on the Dielectric Strength of Thermally Grown SiO[sub 2] FilmsJournal of the Electrochemical Society, 1970