Velocity Exponent in Solid‐Particle Erosion of Silicon
- 1 October 1983
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 66 (10) , c184-c186
- https://doi.org/10.1111/j.1151-2916.1983.tb10547.x
Abstract
The velocity dependence of the solid‐particle steady‐state erosion rate of (111) silicon single crystals was measured for a range of particle types (Al2O3, SiC, and SiO2) and two sizes (40 and 270 μm) from velocities of 30 to 150 m/s. Power‐law velocity dependence was found in all cases, but the velocity exponent n decreases with increasing size, contrary to current theories which predict a constant n. One possible interpretation of this effect is considered.Keywords
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