Velocity Exponent in Solid‐Particle Erosion of Silicon

Abstract
The velocity dependence of the solid‐particle steady‐state erosion rate of (111) silicon single crystals was measured for a range of particle types (Al2O3, SiC, and SiO2) and two sizes (40 and 270 μm) from velocities of 30 to 150 m/s. Power‐law velocity dependence was found in all cases, but the velocity exponent n decreases with increasing size, contrary to current theories which predict a constant n. One possible interpretation of this effect is considered.