Synthesis of silicon nitride films by ion-beam-enhanced deposition and their protective properties against oxidation
- 1 December 1989
- journal article
- Published by Elsevier in Materials Science and Engineering: A
- Vol. 120-121, 519-523
- https://doi.org/10.1016/0921-5093(89)90809-5
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Synthesis of silicon nitride films by ion beam enhanced depositionNuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
- Ion ImplantationMRS Bulletin, 1987
- Ion-Beam-Assisted Deposition and SynthesisMRS Bulletin, 1987
- Ion Beam Mixing: Amorphous, Crystalline, and Quasicrystalline PhasesMRS Bulletin, 1987
- Role of ions in ion-based film formationThin Solid Films, 1982