Electron and ion radiation damage of a-C:H films detected by energy loss spectroscopy of reflected and transmitted electrons
- 1 September 1992
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 217 (1-2) , 48-55
- https://doi.org/10.1016/0040-6090(92)90604-a
Abstract
No abstract availableKeywords
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