Electromagnetic actuation and MOS-transistor sensing for CMOS-integrated micromechanical resonators
- 1 January 2003
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 103 (1-2) , 150-155
- https://doi.org/10.1016/s0924-4247(02)00307-2
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
- Smart single-chip gas sensor microsystemNature, 2001
- Micromachined thermally based CMOS microsensorsProceedings of the IEEE, 1998
- Ultrasound barrier microsystem for object detection based on micromachined transducer elementsJournal of Microelectromechanical Systems, 1997
- Micromechanics: A toolbox for femtoscale science: “Towards a laboratory on a tip”Microelectronic Engineering, 1997
- Performances of Mass-Sensitive Devices for Gas Sensing: Thickness Shear Mode and Surface Acoustic Wave TransducersAnalytical Chemistry, 1996
- Viscous drag measurements utilizing microfabricated cantileversApplied Physics Letters, 1996
- Self-excited piezoelectric cantilever oscillatorsSensors and Actuators A: Physical, 1996
- Photothermal spectroscopy with femtojoule sensitivity using a micromechanical deviceNature, 1994
- Acoustic Wave MicrosensorsAnalytical Chemistry, 1993
- Thermally excited silicon oxide beam and bridge resonators in CMOS technologyIEEE Transactions on Electron Devices, 1993