Ultrasound barrier microsystem for object detection based on micromachined transducer elements
- 1 June 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in Journal of Microelectromechanical Systems
- Vol. 6 (2) , 151-160
- https://doi.org/10.1109/84.585793
Abstract
No abstract availableKeywords
This publication has 16 references indexed in Scilit:
- Optimization Of Micromachined Ultrasound Transducer By Finite Element SimulationPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Ultrasound-transducer using membrane resonators realized with bipolar IC technologyPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2002
- CMOS as sensor technologySensors and Actuators A: Physical, 1993
- On the resonance frequencies of microbridgesPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1991
- Acoustic sensorsSensors and Actuators A: Physical, 1991
- B-mode imaging using Si ultrasonic image sensorSensors and Actuators A: Physical, 1990
- Performance of thermally excited resonatorsSensors and Actuators A: Physical, 1990
- Thermally Excited Resonating Membrane Mass Flow SensorSensors and Actuators, 1989
- Study of electrochemical etch-stop for high-precision thickness control of silicon membranesIEEE Transactions on Electron Devices, 1989
- MikromechanikPublished by Springer Nature ,1989