Ultrasound-transducer using membrane resonators realized with bipolar IC technology
- 17 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
- Thermally excited silicon oxide beam and bridge resonators in CMOS technologyIEEE Transactions on Electron Devices, 1993
- A silicon subminiature microphone based on piezoresistive polysilicon strain gaugesSensors and Actuators A: Physical, 1992
- The dynamic mechanical characteristics of a resonating microbridge mass-flow sensorSensors and Actuators A: Physical, 1991
- Acoustic sensorsSensors and Actuators A: Physical, 1991
- Thermally Excited Resonating Membrane Mass Flow SensorSensors and Actuators, 1989
- The flexural vibration of slightly curved slender beams subject to axial end displacementJournal of Sound and Vibration, 1986