X-ray assisted nitridation of silicon surface at ambient temperature
- 30 September 1989
- journal article
- Published by Elsevier in Solid State Communications
- Vol. 71 (9) , 721-725
- https://doi.org/10.1016/0038-1098(89)90073-2
Abstract
No abstract availableThis publication has 19 references indexed in Scilit:
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