Diamond microstructure replicas from silicon masters

This publication has 13 references indexed in Scilit:

• Technology Of Diamond Microelctromechanical Systems
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• A Novel Low Field Electron Emission Polyerystalline Diamond Microtip Arrays For Sensor Applications
  Published by Institute of Electrical and Electronics Engineers (IEEE) ,2005
• Fabrication of integrated diamond cantilevers with tips for SPM applications
  Diamond and Related Materials, 1997
• Direct current bias applied to hot flame diamond deposition produces smooth low friction coatings
  Wear, 1996
• Diamond deposition by coiled and grid filaments using high methane concentrations
  Diamond and Related Materials, 1996
• Residual stress, Young's modulus and fracture stress of hot flame deposited diamond
  Thin Solid Films, 1995
• Thinning and polishing of diamond films by diffusional reaction with metals
  Published by SPIE-Intl Soc Optical Eng ,1992
• Characterization of polycrystalline diamond thin films grown on various substrates
  Thin Solid Films, 1992
• Silicon as a mechanical material
  Proceedings of the IEEE, 1982
• On etching very narrow grooves in silicon
  Applied Physics Letters, 1975