Resists for microlithography: Present status and recent research trends
- 31 December 1992
- journal article
- review article
- Published by Elsevier in Progress in Polymer Science
- Vol. 17 (3) , 319-360
- https://doi.org/10.1016/0079-6700(92)90019-u
Abstract
No abstract availableThis publication has 100 references indexed in Scilit:
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