Chemical characterization of plasma-polymerized hexamethyldisilazane by nuclear elastic recoil detection
- 1 February 1986
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 136 (1) , 85-92
- https://doi.org/10.1016/0040-6090(86)90111-2
Abstract
No abstract availableThis publication has 20 references indexed in Scilit:
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